JPH0463121U - - Google Patents
Info
- Publication number
- JPH0463121U JPH0463121U JP10422690U JP10422690U JPH0463121U JP H0463121 U JPH0463121 U JP H0463121U JP 10422690 U JP10422690 U JP 10422690U JP 10422690 U JP10422690 U JP 10422690U JP H0463121 U JPH0463121 U JP H0463121U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- implant impurities
- ion implantation
- implanters
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000007943 implant Substances 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004949 mass spectrometry Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10422690U JPH0463121U (en]) | 1990-10-03 | 1990-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10422690U JPH0463121U (en]) | 1990-10-03 | 1990-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0463121U true JPH0463121U (en]) | 1992-05-29 |
Family
ID=31849431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10422690U Pending JPH0463121U (en]) | 1990-10-03 | 1990-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0463121U (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961043A (ja) * | 1982-09-29 | 1984-04-07 | Nec Corp | イオン注入用試料ホルダ− |
| JPS5986147A (ja) * | 1983-09-28 | 1984-05-18 | Hitachi Ltd | ウエハホルダ |
| JPS5952626B2 (ja) * | 1977-09-12 | 1984-12-20 | 松下電器産業株式会社 | 回転子直流励磁型パルスモ−タ |
-
1990
- 1990-10-03 JP JP10422690U patent/JPH0463121U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5952626B2 (ja) * | 1977-09-12 | 1984-12-20 | 松下電器産業株式会社 | 回転子直流励磁型パルスモ−タ |
| JPS5961043A (ja) * | 1982-09-29 | 1984-04-07 | Nec Corp | イオン注入用試料ホルダ− |
| JPS5986147A (ja) * | 1983-09-28 | 1984-05-18 | Hitachi Ltd | ウエハホルダ |
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